10/12/2011	12:00:44 AM	Helium valve closed
10/12/2011	12:00:44 AM	BCl3 valve closed
10/12/2011	12:00:44 AM	PH3 valve closed
10/12/2011	12:00:44 AM	SiCl4 pre valve closed
10/12/2011	12:00:44 AM	SiCl4 post valve closed
10/12/2011	12:00:44 AM	Main Vac valve closed
10/12/2011	12:00:44 AM	Bypass valve closed
10/12/2011	12:00:44 AM	Bubbler valve closed
10/12/2011	12:00:44 AM	H2 valve opened
10/12/2011	12:00:44 AM	Helium MFC set to  0.000000
10/12/2011	12:00:44 AM	H2 MFC set to  500.000000
10/12/2011	12:00:44 AM	BCl3 MFC set to  0.000000
10/12/2011	12:00:44 AM	PHl3 MFC set to  0.000000
10/12/2011	12:00:44 AM	SiCl4 MFC set to  0.000000
10/12/2011	12:00:44 AM	Bypass solenoid MFC set to  0.000000
10/12/2011	12:00:44 AM	Tube furnace set to 1000
10/12/2011	12:01:48 AM	Helium valve closed
10/12/2011	12:01:48 AM	BCl3 valve closed
10/12/2011	12:01:48 AM	PH3 valve closed
10/12/2011	12:01:48 AM	SiCl4 pre valve closed
10/12/2011	12:01:48 AM	SiCl4 post valve closed
10/12/2011	12:01:48 AM	Main Vac valve closed
10/12/2011	12:01:48 AM	Bypass valve closed
10/12/2011	12:01:48 AM	H2 valve opened
10/12/2011	12:01:48 AM	Bubbler valve opened
10/12/2011	12:01:48 AM	Helium MFC set to  0.000000
10/12/2011	12:01:48 AM	H2 MFC set to  500.000000
10/12/2011	12:01:48 AM	BCl3 MFC set to  0.000000
10/12/2011	12:01:48 AM	PHl3 MFC set to  0.000000
10/12/2011	12:01:48 AM	SiCl4 MFC set to  0.000000
10/12/2011	12:01:48 AM	Bypass solenoid MFC set to  0.000000
10/12/2011	12:01:48 AM	Tube furnace set to 1000
10/12/2011	12:01:49 AM	Helium valve closed
10/12/2011	12:01:49 AM	BCl3 valve closed
10/12/2011	12:01:49 AM	PH3 valve closed
10/12/2011	12:01:49 AM	SiCl4 pre valve closed
10/12/2011	12:01:49 AM	SiCl4 post valve closed
10/12/2011	12:01:49 AM	Main Vac valve closed
10/12/2011	12:01:49 AM	Bypass valve closed
10/12/2011	12:01:49 AM	H2 valve opened
10/12/2011	12:01:49 AM	Bubbler valve opened
10/12/2011	12:01:49 AM	Helium MFC set to  0.000000
10/12/2011	12:01:49 AM	H2 MFC set to  500.000000
10/12/2011	12:01:49 AM	BCl3 MFC set to  0.000000
10/12/2011	12:01:49 AM	PHl3 MFC set to  0.000000
10/12/2011	12:01:49 AM	SiCl4 MFC set to  0.000000
10/12/2011	12:01:49 AM	Bypass solenoid MFC set to  0.000000
10/12/2011	12:01:49 AM	Tube furnace set to 1000
10/12/2011	12:21:49 AM	Helium valve closed
10/12/2011	12:21:49 AM	BCl3 valve closed
10/12/2011	12:21:49 AM	PH3 valve closed
10/12/2011	12:21:49 AM	Main Vac valve closed
10/12/2011	12:21:49 AM	Bypass valve closed
10/12/2011	12:21:49 AM	H2 valve opened
10/12/2011	12:21:49 AM	SiCl4 pre valve opened
10/12/2011	12:21:49 AM	SiCl4 post valve opened
10/12/2011	12:21:49 AM	Bubbler valve opened
10/12/2011	12:21:49 AM	Helium MFC set to  0.000000
10/12/2011	12:21:49 AM	H2 MFC set to  500.000000
10/12/2011	12:21:49 AM	BCl3 MFC set to  0.000000
10/12/2011	12:21:49 AM	PHl3 MFC set to  0.000000
10/12/2011	12:21:49 AM	SiCl4 MFC set to  25.000000
10/12/2011	12:21:49 AM	Bypass solenoid MFC set to  0.000000
10/12/2011	12:21:49 AM	Tube furnace set to 1000
10/12/2011	12:37:49 AM	Helium valve closed
10/12/2011	12:37:49 AM	BCl3 valve closed
10/12/2011	12:37:49 AM	PH3 valve closed
10/12/2011	12:37:49 AM	SiCl4 pre valve closed
10/12/2011	12:37:49 AM	SiCl4 post valve closed
10/12/2011	12:37:49 AM	Main Vac valve closed
10/12/2011	12:37:49 AM	Bypass valve closed
10/12/2011	12:37:49 AM	H2 valve opened
10/12/2011	12:37:49 AM	Bubbler valve opened
10/12/2011	12:37:49 AM	Helium MFC set to  0.000000
10/12/2011	12:37:49 AM	H2 MFC set to  500.000000
10/12/2011	12:37:49 AM	BCl3 MFC set to  0.000000
10/12/2011	12:37:49 AM	PHl3 MFC set to  0.000000
10/12/2011	12:37:49 AM	SiCl4 MFC set to  0.000000
10/12/2011	12:37:49 AM	Bypass solenoid MFC set to  0.000000
10/12/2011	12:37:49 AM	Tube furnace set to 975
10/12/2011	12:39:19 AM	Helium valve closed
10/12/2011	12:39:19 AM	BCl3 valve closed
10/12/2011	12:39:19 AM	PH3 valve closed
10/12/2011	12:39:19 AM	SiCl4 pre valve closed
10/12/2011	12:39:19 AM	SiCl4 post valve closed
10/12/2011	12:39:19 AM	Main Vac valve closed
10/12/2011	12:39:19 AM	Bypass valve closed
10/12/2011	12:39:19 AM	H2 valve opened
10/12/2011	12:39:19 AM	Bubbler valve opened
10/12/2011	12:39:19 AM	Helium MFC set to  0.000000
10/12/2011	12:39:19 AM	H2 MFC set to  500.000000
10/12/2011	12:39:19 AM	BCl3 MFC set to  0.000000
10/12/2011	12:39:19 AM	PHl3 MFC set to  0.000000
10/12/2011	12:39:19 AM	SiCl4 MFC set to  0.000000
10/12/2011	12:39:19 AM	Bypass solenoid MFC set to  0.000000
10/12/2011	12:39:19 AM	Tube furnace set to 950
10/12/2011	12:40:49 AM	Helium valve closed
10/12/2011	12:40:49 AM	BCl3 valve closed
10/12/2011	12:40:49 AM	PH3 valve closed
10/12/2011	12:40:49 AM	SiCl4 pre valve closed
10/12/2011	12:40:49 AM	SiCl4 post valve closed
10/12/2011	12:40:49 AM	Main Vac valve closed
10/12/2011	12:40:49 AM	Bypass valve closed
10/12/2011	12:40:49 AM	H2 valve opened
10/12/2011	12:40:49 AM	Bubbler valve opened
10/12/2011	12:40:49 AM	Helium MFC set to  0.000000
10/12/2011	12:40:49 AM	H2 MFC set to  500.000000
10/12/2011	12:40:49 AM	BCl3 MFC set to  0.000000
10/12/2011	12:40:49 AM	PHl3 MFC set to  0.000000
10/12/2011	12:40:49 AM	SiCl4 MFC set to  0.000000
10/12/2011	12:40:49 AM	Bypass solenoid MFC set to  0.000000
10/12/2011	12:40:50 AM	Tube furnace set to 925
10/12/2011	12:42:20 AM	Helium valve closed
10/12/2011	12:42:20 AM	BCl3 valve closed
10/12/2011	12:42:20 AM	PH3 valve closed
10/12/2011	12:42:20 AM	SiCl4 pre valve closed
10/12/2011	12:42:20 AM	SiCl4 post valve closed
10/12/2011	12:42:20 AM	Main Vac valve closed
10/12/2011	12:42:20 AM	Bypass valve closed
10/12/2011	12:42:20 AM	H2 valve opened
10/12/2011	12:42:20 AM	Bubbler valve opened
10/12/2011	12:42:20 AM	Helium MFC set to  0.000000
10/12/2011	12:42:20 AM	H2 MFC set to  500.000000
10/12/2011	12:42:20 AM	BCl3 MFC set to  0.000000
10/12/2011	12:42:20 AM	PHl3 MFC set to  0.000000
10/12/2011	12:42:20 AM	SiCl4 MFC set to  0.000000
10/12/2011	12:42:20 AM	Bypass solenoid MFC set to  0.000000
10/12/2011	12:42:20 AM	Tube furnace set to 900
10/12/2011	12:43:50 AM	H2 valve closed
10/12/2011	12:43:50 AM	BCl3 valve closed
10/12/2011	12:43:50 AM	PH3 valve closed
10/12/2011	12:43:50 AM	SiCl4 pre valve closed
10/12/2011	12:43:50 AM	SiCl4 post valve closed
10/12/2011	12:43:50 AM	Main Vac valve closed
10/12/2011	12:43:50 AM	Bypass valve closed
10/12/2011	12:43:50 AM	Helium valve opened
10/12/2011	12:43:50 AM	Bubbler valve opened
10/12/2011	12:43:50 AM	Helium MFC set to  500.000000
10/12/2011	12:43:50 AM	H2 MFC set to  0.000000
10/12/2011	12:43:50 AM	BCl3 MFC set to  0.000000
10/12/2011	12:43:50 AM	PHl3 MFC set to  0.000000
10/12/2011	12:43:50 AM	SiCl4 MFC set to  0.000000
10/12/2011	12:43:50 AM	Bypass solenoid MFC set to  0.000000
10/12/2011	12:43:50 AM	Tube furnace set to 875
10/12/2011	12:45:20 AM	H2 valve closed
10/12/2011	12:45:20 AM	BCl3 valve closed
10/12/2011	12:45:20 AM	PH3 valve closed
10/12/2011	12:45:20 AM	SiCl4 pre valve closed
10/12/2011	12:45:20 AM	SiCl4 post valve closed
10/12/2011	12:45:20 AM	Main Vac valve closed
10/12/2011	12:45:20 AM	Bypass valve closed
10/12/2011	12:45:20 AM	Helium valve opened
10/12/2011	12:45:20 AM	Bubbler valve opened
10/12/2011	12:45:20 AM	Helium MFC set to  500.000000
10/12/2011	12:45:20 AM	H2 MFC set to  0.000000
10/12/2011	12:45:20 AM	BCl3 MFC set to  0.000000
10/12/2011	12:45:20 AM	PHl3 MFC set to  0.000000
10/12/2011	12:45:20 AM	SiCl4 MFC set to  0.000000
10/12/2011	12:45:20 AM	Bypass solenoid MFC set to  0.000000
10/12/2011	12:45:20 AM	Tube furnace set to 850
10/12/2011	12:46:50 AM	H2 valve closed
10/12/2011	12:46:50 AM	BCl3 valve closed
10/12/2011	12:46:50 AM	PH3 valve closed
10/12/2011	12:46:50 AM	SiCl4 pre valve closed
10/12/2011	12:46:50 AM	SiCl4 post valve closed
10/12/2011	12:46:50 AM	Main Vac valve closed
10/12/2011	12:46:50 AM	Bypass valve closed
10/12/2011	12:46:50 AM	Helium valve opened
10/12/2011	12:46:50 AM	Bubbler valve opened
10/12/2011	12:46:50 AM	Helium MFC set to  500.000000
10/12/2011	12:46:50 AM	H2 MFC set to  0.000000
10/12/2011	12:46:50 AM	BCl3 MFC set to  0.000000
10/12/2011	12:46:50 AM	PHl3 MFC set to  0.000000
10/12/2011	12:46:50 AM	SiCl4 MFC set to  0.000000
10/12/2011	12:46:50 AM	Bypass solenoid MFC set to  0.000000
10/12/2011	12:46:50 AM	Tube furnace set to 825
10/12/2011	12:48:20 AM	H2 valve closed
10/12/2011	12:48:20 AM	BCl3 valve closed
10/12/2011	12:48:20 AM	PH3 valve closed
10/12/2011	12:48:20 AM	SiCl4 pre valve closed
10/12/2011	12:48:20 AM	SiCl4 post valve closed
10/12/2011	12:48:20 AM	Main Vac valve closed
10/12/2011	12:48:20 AM	Bypass valve closed
10/12/2011	12:48:20 AM	Helium valve opened
10/12/2011	12:48:20 AM	Bubbler valve opened
10/12/2011	12:48:20 AM	Helium MFC set to  500.000000
10/12/2011	12:48:20 AM	H2 MFC set to  0.000000
10/12/2011	12:48:20 AM	BCl3 MFC set to  0.000000
10/12/2011	12:48:20 AM	PHl3 MFC set to  0.000000
10/12/2011	12:48:20 AM	SiCl4 MFC set to  0.000000
10/12/2011	12:48:20 AM	Bypass solenoid MFC set to  0.000000
10/12/2011	12:48:21 AM	Tube furnace set to 800
10/12/2011	12:49:51 AM	H2 valve closed
10/12/2011	12:49:51 AM	BCl3 valve closed
10/12/2011	12:49:51 AM	PH3 valve closed
10/12/2011	12:49:51 AM	SiCl4 pre valve closed
10/12/2011	12:49:51 AM	SiCl4 post valve closed
10/12/2011	12:49:51 AM	Main Vac valve closed
10/12/2011	12:49:51 AM	Bypass valve closed
10/12/2011	12:49:51 AM	Helium valve opened
10/12/2011	12:49:51 AM	Bubbler valve opened
10/12/2011	12:49:51 AM	Helium MFC set to  500.000000
10/12/2011	12:49:51 AM	H2 MFC set to  0.000000
10/12/2011	12:49:51 AM	BCl3 MFC set to  0.000000
10/12/2011	12:49:51 AM	PHl3 MFC set to  0.000000
10/12/2011	12:49:51 AM	SiCl4 MFC set to  0.000000
10/12/2011	12:49:51 AM	Bypass solenoid MFC set to  0.000000
10/12/2011	12:49:51 AM	Tube furnace set to 0
10/12/2011	1:04:51 AM	Helium valve closed
10/12/2011	1:04:51 AM	H2 valve closed
10/12/2011	1:04:51 AM	BCl3 valve closed
10/12/2011	1:04:51 AM	PH3 valve closed
10/12/2011	1:04:51 AM	SiCl4 pre valve closed
10/12/2011	1:04:51 AM	SiCl4 post valve closed
10/12/2011	1:04:51 AM	Main Vac valve closed
10/12/2011	1:04:51 AM	Bypass valve closed
10/12/2011	1:04:51 AM	Bubbler valve closed
10/12/2011	1:04:51 AM	Helium MFC set to  0.000000
10/12/2011	1:04:51 AM	H2 MFC set to  0.000000
10/12/2011	1:04:51 AM	BCl3 MFC set to  0.000000
10/12/2011	1:04:51 AM	PHl3 MFC set to  0.000000
10/12/2011	1:04:51 AM	SiCl4 MFC set to  0.000000
10/12/2011	1:04:51 AM	Bypass solenoid MFC set to  0.000000
10/12/2011	1:04:51 AM	Tube furnace set to 0
10/12/2011	2:04:51 AM	H2 valve closed
10/12/2011	2:04:51 AM	BCl3 valve closed
10/12/2011	2:04:51 AM	PH3 valve closed
10/12/2011	2:04:51 AM	SiCl4 pre valve closed
10/12/2011	2:04:51 AM	SiCl4 post valve closed
10/12/2011	2:04:51 AM	Main Vac valve closed
10/12/2011	2:04:51 AM	Bypass valve closed
10/12/2011	2:04:51 AM	Bubbler valve closed
10/12/2011	2:04:51 AM	Helium valve opened
10/12/2011	2:04:51 AM	Helium MFC set to  500.000000
10/12/2011	2:04:51 AM	H2 MFC set to  0.000000
10/12/2011	2:04:51 AM	BCl3 MFC set to  0.000000
10/12/2011	2:04:51 AM	PHl3 MFC set to  0.000000
10/12/2011	2:04:51 AM	SiCl4 MFC set to  0.000000
10/12/2011	2:04:51 AM	Bypass solenoid MFC set to  0.000000
10/12/2011	2:04:51 AM	Tube furnace set to 0
10/12/2011	2:04:57 AM	H2 valve closed
10/12/2011	2:04:57 AM	BCl3 valve closed
10/12/2011	2:04:57 AM	PH3 valve closed
10/12/2011	2:04:57 AM	SiCl4 pre valve closed
10/12/2011	2:04:57 AM	SiCl4 post valve closed
10/12/2011	2:04:57 AM	Main Vac valve closed
10/12/2011	2:04:57 AM	Bypass valve closed
10/12/2011	2:04:57 AM	Helium valve opened
10/12/2011	2:04:57 AM	Bubbler valve opened
10/12/2011	2:04:57 AM	Helium MFC set to  500.000000
10/12/2011	2:04:57 AM	H2 MFC set to  0.000000
10/12/2011	2:04:57 AM	BCl3 MFC set to  0.000000
10/12/2011	2:04:57 AM	PHl3 MFC set to  0.000000
10/12/2011	2:04:57 AM	SiCl4 MFC set to  0.000000
10/12/2011	2:04:57 AM	Bypass solenoid MFC set to  0.000000
10/12/2011	2:04:57 AM	Tube furnace set to 0
10/12/2011	2:09:57 AM	Helium valve closed
10/12/2011	2:09:57 AM	H2 valve closed
10/12/2011	2:09:57 AM	BCl3 valve closed
10/12/2011	2:09:57 AM	PH3 valve closed
10/12/2011	2:09:57 AM	SiCl4 pre valve closed
10/12/2011	2:09:57 AM	SiCl4 post valve closed
10/12/2011	2:09:57 AM	Main Vac valve closed
10/12/2011	2:09:57 AM	Bypass valve closed
10/12/2011	2:09:57 AM	Bubbler valve closed
10/12/2011	2:09:57 AM	Helium MFC set to  0.000000
10/12/2011	2:09:57 AM	H2 MFC set to  0.000000
10/12/2011	2:09:57 AM	BCl3 MFC set to  0.000000
10/12/2011	2:09:57 AM	PHl3 MFC set to  0.000000
10/12/2011	2:09:57 AM	SiCl4 MFC set to  0.000000
10/12/2011	2:09:57 AM	Bypass solenoid MFC set to  0.000000
10/12/2011	2:09:57 AM	Tube furnace set to 0
10/12/2011	2:09:58 AM	Helium valve closed
10/12/2011	2:09:58 AM	H2 valve closed
10/12/2011	2:09:58 AM	BCl3 valve closed
10/12/2011	2:09:58 AM	PH3 valve closed
10/12/2011	2:09:58 AM	SiCl4 pre valve closed
10/12/2011	2:09:58 AM	SiCl4 post valve closed
10/12/2011	2:09:58 AM	Main Vac valve closed
10/12/2011	2:09:58 AM	Bubbler valve closed
10/12/2011	2:09:58 AM	Bypass valve opened
10/12/2011	2:09:58 AM	Helium MFC set to  0.000000
10/12/2011	2:09:58 AM	H2 MFC set to  0.000000
10/12/2011	2:09:58 AM	BCl3 MFC set to  0.000000
10/12/2011	2:09:58 AM	PHl3 MFC set to  0.000000
10/12/2011	2:09:58 AM	SiCl4 MFC set to  0.000000
10/12/2011	2:09:58 AM	Bypass solenoid MFC set to  0.000000
10/12/2011	2:09:58 AM	Tube furnace set to 0
10/12/2011	2:10:49 AM	Helium valve closed
10/12/2011	2:10:49 AM	H2 valve closed
10/12/2011	2:10:49 AM	BCl3 valve closed
10/12/2011	2:10:49 AM	PH3 valve closed
10/12/2011	2:10:49 AM	SiCl4 pre valve closed
10/12/2011	2:10:49 AM	SiCl4 post valve closed
10/12/2011	2:10:49 AM	Main Vac valve closed
10/12/2011	2:10:49 AM	Bubbler valve closed
10/12/2011	2:10:49 AM	Bypass valve opened
10/12/2011	2:10:49 AM	Helium MFC set to  0.000000
10/12/2011	2:10:49 AM	H2 MFC set to  0.000000
10/12/2011	2:10:49 AM	BCl3 MFC set to  0.000000
10/12/2011	2:10:49 AM	PHl3 MFC set to  0.000000
10/12/2011	2:10:49 AM	SiCl4 MFC set to  0.000000
10/12/2011	2:10:49 AM	Bypass solenoid MFC set to  0.000000
10/12/2011	2:10:49 AM	Tube furnace set to 0
10/12/2011	2:11:49 AM	Helium valve closed
10/12/2011	2:11:49 AM	H2 valve closed
10/12/2011	2:11:49 AM	BCl3 valve closed
10/12/2011	2:11:49 AM	PH3 valve closed
10/12/2011	2:11:49 AM	SiCl4 pre valve closed
10/12/2011	2:11:49 AM	SiCl4 post valve closed
10/12/2011	2:11:49 AM	Bypass valve closed
10/12/2011	2:11:49 AM	Bubbler valve closed
10/12/2011	2:11:49 AM	Main Vac valve opened
10/12/2011	2:11:49 AM	Helium MFC set to  0.000000
10/12/2011	2:11:49 AM	H2 MFC set to  0.000000
10/12/2011	2:11:49 AM	BCl3 MFC set to  0.000000
10/12/2011	2:11:49 AM	PHl3 MFC set to  0.000000
10/12/2011	2:11:49 AM	SiCl4 MFC set to  0.000000
10/12/2011	2:11:49 AM	Bypass solenoid MFC set to  0.000000
10/12/2011	2:11:49 AM	Tube furnace set to 0
10/12/2011	4:51:49 AM	Run finished at 4:51 AM
10/12/2011	7:22:26 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/12/2011	7:22:27 AM	Recipe started at 7:22 AM
10/12/2011	7:22:27 AM	Helium valve closed
10/12/2011	7:22:27 AM	H2 valve closed
10/12/2011	7:22:27 AM	BCl3 valve closed
10/12/2011	7:22:27 AM	PH3 valve closed
10/12/2011	7:22:27 AM	SiCl4 pre valve closed
10/12/2011	7:22:27 AM	SiCl4 post valve closed
10/12/2011	7:22:27 AM	Main Vac valve closed
10/12/2011	7:22:27 AM	Bypass valve closed
10/12/2011	7:22:27 AM	Bubbler valve closed
10/12/2011	7:22:27 AM	Helium MFC set to  0.000000
10/12/2011	7:22:27 AM	H2 MFC set to  0.000000
10/12/2011	7:22:27 AM	BCl3 MFC set to  0.000000
10/12/2011	7:22:27 AM	PHl3 MFC set to  0.000000
10/12/2011	7:22:27 AM	SiCl4 MFC set to  0.000000
10/12/2011	7:22:27 AM	Bypass solenoid MFC set to  0.000000
10/12/2011	7:22:27 AM	Tube furnace set to 0
10/12/2011	7:22:30 AM	H2 valve closed
10/12/2011	7:22:30 AM	BCl3 valve closed
10/12/2011	7:22:30 AM	PH3 valve closed
10/12/2011	7:22:30 AM	SiCl4 pre valve closed
10/12/2011	7:22:30 AM	SiCl4 post valve closed
10/12/2011	7:22:30 AM	Main Vac valve closed
10/12/2011	7:22:30 AM	Bypass valve closed
10/12/2011	7:22:30 AM	Bubbler valve closed
10/12/2011	7:22:30 AM	Helium valve opened
10/12/2011	7:22:30 AM	Helium MFC set to  500.000000
10/12/2011	7:22:30 AM	H2 MFC set to  0.000000
10/12/2011	7:22:30 AM	BCl3 MFC set to  0.000000
10/12/2011	7:22:30 AM	PHl3 MFC set to  0.000000
10/12/2011	7:22:30 AM	SiCl4 MFC set to  0.000000
10/12/2011	7:22:30 AM	Bypass solenoid MFC set to  0.000000
10/12/2011	7:22:31 AM	Tube furnace set to 0
10/12/2011	7:23:36 AM	Helium valve closed
10/12/2011	7:23:36 AM	H2 valve closed
10/12/2011	7:23:36 AM	BCl3 valve closed
10/12/2011	7:23:36 AM	PH3 valve closed
10/12/2011	7:23:36 AM	SiCl4 pre valve closed
10/12/2011	7:23:36 AM	SiCl4 post valve closed
10/12/2011	7:23:36 AM	Main Vac valve closed
10/12/2011	7:23:36 AM	Bypass valve closed
10/12/2011	7:23:36 AM	Bubbler valve closed
10/12/2011	7:23:36 AM	Helium MFC set to  0.000000
10/12/2011	7:23:36 AM	H2 MFC set to  0.000000
10/12/2011	7:23:36 AM	BCl3 MFC set to  0.000000
10/12/2011	7:23:36 AM	PHl3 MFC set to  0.000000
10/12/2011	7:23:36 AM	SiCl4 MFC set to  0.000000
10/12/2011	7:23:36 AM	Bypass solenoid MFC set to  0.000000
10/12/2011	7:23:37 AM	Tube furnace set to 0
10/12/2011	7:23:38 AM	Run finished at 7:23 AM
10/12/2011	7:23:38 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/12/2011	7:31:18 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/12/2011	7:31:18 AM	Recipe started at 7:31 AM
10/12/2011	7:31:19 AM	Helium valve closed
10/12/2011	7:31:19 AM	H2 valve closed
10/12/2011	7:31:19 AM	BCl3 valve closed
10/12/2011	7:31:19 AM	PH3 valve closed
10/12/2011	7:31:19 AM	SiCl4 pre valve closed
10/12/2011	7:31:19 AM	SiCl4 post valve closed
10/12/2011	7:31:19 AM	Main Vac valve closed
10/12/2011	7:31:19 AM	Bubbler valve closed
10/12/2011	7:31:19 AM	Bypass valve opened
10/12/2011	7:31:19 AM	Helium MFC set to  0.000000
10/12/2011	7:31:19 AM	H2 MFC set to  0.000000
10/12/2011	7:31:19 AM	BCl3 MFC set to  0.000000
10/12/2011	7:31:19 AM	PHl3 MFC set to  0.000000
10/12/2011	7:31:19 AM	SiCl4 MFC set to  0.000000
10/12/2011	7:31:19 AM	Bypass solenoid MFC set to  0.000000
10/12/2011	7:31:19 AM	Tube furnace set to 0
10/12/2011	7:32:28 AM	Helium valve closed
10/12/2011	7:32:28 AM	H2 valve closed
10/12/2011	7:32:28 AM	BCl3 valve closed
10/12/2011	7:32:28 AM	PH3 valve closed
10/12/2011	7:32:28 AM	SiCl4 pre valve closed
10/12/2011	7:32:28 AM	SiCl4 post valve closed
10/12/2011	7:32:28 AM	Main Vac valve closed
10/12/2011	7:32:28 AM	Bubbler valve closed
10/12/2011	7:32:28 AM	Bypass valve opened
10/12/2011	7:32:28 AM	Helium MFC set to  0.000000
10/12/2011	7:32:28 AM	H2 MFC set to  0.000000
10/12/2011	7:32:28 AM	BCl3 MFC set to  0.000000
10/12/2011	7:32:28 AM	PHl3 MFC set to  0.000000
10/12/2011	7:32:28 AM	SiCl4 MFC set to  0.000000
10/12/2011	7:32:28 AM	Bypass solenoid MFC set to  0.000000
10/12/2011	7:32:28 AM	Tube furnace set to 0
10/12/2011	7:33:28 AM	Helium valve closed
10/12/2011	7:33:28 AM	H2 valve closed
10/12/2011	7:33:28 AM	BCl3 valve closed
10/12/2011	7:33:28 AM	PH3 valve closed
10/12/2011	7:33:28 AM	SiCl4 pre valve closed
10/12/2011	7:33:28 AM	SiCl4 post valve closed
10/12/2011	7:33:28 AM	Bypass valve closed
10/12/2011	7:33:28 AM	Bubbler valve closed
10/12/2011	7:33:28 AM	Main Vac valve opened
10/12/2011	7:33:28 AM	Helium MFC set to  0.000000
10/12/2011	7:33:28 AM	H2 MFC set to  0.000000
10/12/2011	7:33:28 AM	BCl3 MFC set to  0.000000
10/12/2011	7:33:28 AM	PHl3 MFC set to  0.000000
10/12/2011	7:33:28 AM	SiCl4 MFC set to  0.000000
10/12/2011	7:33:28 AM	Bypass solenoid MFC set to  0.000000
10/12/2011	7:33:28 AM	Tube furnace set to 0
10/12/2011	7:33:29 AM	Run finished at 7:33 AM
10/12/2011	7:33:29 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/12/2011	4:47:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/12/2011	4:47:20 PM	Recipe started at 4:47 PM
10/12/2011	4:47:20 PM	Helium valve closed
10/12/2011	4:47:20 PM	H2 valve closed
10/12/2011	4:47:20 PM	BCl3 valve closed
10/12/2011	4:47:20 PM	PH3 valve closed
10/12/2011	4:47:20 PM	SiCl4 pre valve closed
10/12/2011	4:47:20 PM	SiCl4 post valve closed
10/12/2011	4:47:20 PM	Main Vac valve closed
10/12/2011	4:47:20 PM	Bypass valve closed
10/12/2011	4:47:20 PM	Bubbler valve closed
10/12/2011	4:47:20 PM	Helium MFC set to  0.000000
10/12/2011	4:47:20 PM	H2 MFC set to  0.000000
10/12/2011	4:47:20 PM	BCl3 MFC set to  0.000000
10/12/2011	4:47:20 PM	PHl3 MFC set to  0.000000
10/12/2011	4:47:20 PM	SiCl4 MFC set to  0.000000
10/12/2011	4:47:20 PM	Bypass solenoid MFC set to  0.000000
10/12/2011	4:47:20 PM	Tube furnace set to 0
10/12/2011	4:47:23 PM	H2 valve closed
10/12/2011	4:47:23 PM	BCl3 valve closed
10/12/2011	4:47:23 PM	PH3 valve closed
10/12/2011	4:47:23 PM	SiCl4 pre valve closed
10/12/2011	4:47:23 PM	SiCl4 post valve closed
10/12/2011	4:47:23 PM	Main Vac valve closed
10/12/2011	4:47:23 PM	Bypass valve closed
10/12/2011	4:47:23 PM	Bubbler valve closed
10/12/2011	4:47:23 PM	Helium valve opened
10/12/2011	4:47:23 PM	Helium MFC set to  500.000000
10/12/2011	4:47:23 PM	H2 MFC set to  0.000000
10/12/2011	4:47:23 PM	BCl3 MFC set to  0.000000
10/12/2011	4:47:23 PM	PHl3 MFC set to  0.000000
10/12/2011	4:47:23 PM	SiCl4 MFC set to  0.000000
10/12/2011	4:47:23 PM	Bypass solenoid MFC set to  0.000000
10/12/2011	4:47:24 PM	Tube furnace set to 0
10/12/2011	4:48:29 PM	Helium valve closed
10/12/2011	4:48:29 PM	H2 valve closed
10/12/2011	4:48:29 PM	BCl3 valve closed
10/12/2011	4:48:29 PM	PH3 valve closed
10/12/2011	4:48:29 PM	SiCl4 pre valve closed
10/12/2011	4:48:29 PM	SiCl4 post valve closed
10/12/2011	4:48:29 PM	Main Vac valve closed
10/12/2011	4:48:29 PM	Bypass valve closed
10/12/2011	4:48:29 PM	Bubbler valve closed
10/12/2011	4:48:29 PM	Helium MFC set to  0.000000
10/12/2011	4:48:29 PM	H2 MFC set to  0.000000
10/12/2011	4:48:29 PM	BCl3 MFC set to  0.000000
10/12/2011	4:48:29 PM	PHl3 MFC set to  0.000000
10/12/2011	4:48:29 PM	SiCl4 MFC set to  0.000000
10/12/2011	4:48:29 PM	Bypass solenoid MFC set to  0.000000
10/12/2011	4:48:29 PM	Tube furnace set to 0
10/12/2011	4:48:30 PM	Run finished at 4:48 PM
10/12/2011	4:48:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/12/2011	4:49:09 PM	Bypass valve opened
10/12/2011	4:49:14 PM	Bypass valve closed
10/12/2011	4:49:22 PM	Bypass valve opened
10/12/2011	5:01:13 PM	Bypass valve closed
10/12/2011	5:01:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/12/2011	5:01:17 PM	Recipe started at 5:01 PM
10/12/2011	5:01:17 PM	Helium valve closed
10/12/2011	5:01:17 PM	H2 valve closed
10/12/2011	5:01:17 PM	BCl3 valve closed
10/12/2011	5:01:17 PM	PH3 valve closed
10/12/2011	5:01:17 PM	SiCl4 pre valve closed
10/12/2011	5:01:17 PM	SiCl4 post valve closed
10/12/2011	5:01:17 PM	Main Vac valve closed
10/12/2011	5:01:17 PM	Bypass valve closed
10/12/2011	5:01:17 PM	Bubbler valve closed
10/12/2011	5:01:17 PM	Helium MFC set to  0.000000
10/12/2011	5:01:17 PM	H2 MFC set to  0.000000
10/12/2011	5:01:17 PM	BCl3 MFC set to  0.000000
10/12/2011	5:01:17 PM	PHl3 MFC set to  0.000000
10/12/2011	5:01:17 PM	SiCl4 MFC set to  0.000000
10/12/2011	5:01:17 PM	Bypass solenoid MFC set to  0.000000
10/12/2011	5:01:17 PM	Tube furnace set to 0
10/12/2011	5:01:20 PM	H2 valve closed
10/12/2011	5:01:20 PM	BCl3 valve closed
10/12/2011	5:01:20 PM	PH3 valve closed
10/12/2011	5:01:20 PM	SiCl4 pre valve closed
10/12/2011	5:01:20 PM	SiCl4 post valve closed
10/12/2011	5:01:20 PM	Main Vac valve closed
10/12/2011	5:01:20 PM	Bypass valve closed
10/12/2011	5:01:20 PM	Bubbler valve closed
10/12/2011	5:01:20 PM	Helium valve opened
10/12/2011	5:01:20 PM	Helium MFC set to  500.000000
10/12/2011	5:01:20 PM	H2 MFC set to  0.000000
10/12/2011	5:01:20 PM	BCl3 MFC set to  0.000000
10/12/2011	5:01:20 PM	PHl3 MFC set to  0.000000
10/12/2011	5:01:20 PM	SiCl4 MFC set to  0.000000
10/12/2011	5:01:20 PM	Bypass solenoid MFC set to  0.000000
10/12/2011	5:01:20 PM	Tube furnace set to 0
10/12/2011	5:02:26 PM	Helium valve closed
10/12/2011	5:02:26 PM	H2 valve closed
10/12/2011	5:02:26 PM	BCl3 valve closed
10/12/2011	5:02:26 PM	PH3 valve closed
10/12/2011	5:02:26 PM	SiCl4 pre valve closed
10/12/2011	5:02:26 PM	SiCl4 post valve closed
10/12/2011	5:02:26 PM	Main Vac valve closed
10/12/2011	5:02:26 PM	Bypass valve closed
10/12/2011	5:02:26 PM	Bubbler valve closed
10/12/2011	5:02:26 PM	Helium MFC set to  0.000000
10/12/2011	5:02:26 PM	H2 MFC set to  0.000000
10/12/2011	5:02:26 PM	BCl3 MFC set to  0.000000
10/12/2011	5:02:26 PM	PHl3 MFC set to  0.000000
10/12/2011	5:02:26 PM	SiCl4 MFC set to  0.000000
10/12/2011	5:02:26 PM	Bypass solenoid MFC set to  0.000000
10/12/2011	5:02:26 PM	Tube furnace set to 0
10/12/2011	5:02:27 PM	Run finished at 5:02 PM
10/12/2011	5:02:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/12/2011	5:18:30 PM	Bypass valve opened
10/12/2011	5:20:03 PM	Bypass valve closed
10/12/2011	5:20:04 PM	Main Vac valve opened
10/12/2011	5:20:15 PM	Main Vac valve closed
10/12/2011	5:20:16 PM	Bypass valve opened
10/12/2011	5:21:02 PM	Main Vac valve opened
10/12/2011	5:21:03 PM	Bypass valve closed
